machines or electron microscopes, where contamination can lead to poor performance, complete malfunction, or unnecessary maintenance.
ASML, a very important customer from our region, has established its own cleaning requirements, defined in various “Grades” and GSA standards. HQ Precision Cleaning is familiar with all these standards and is officially approved to perform Grade 1 cleaning, the strictest ASML requirement.
Within cleaning processes, a further subdivision is often made into Surface Cleanliness, Vacuum Cleanliness (molecular contamination), and Gas Purity (contamination in piping). Depending on the component or assembly, these can be applied separately or in combination. They are explained in more detail below, followed by an overview of the processes we use for cleaning. These processes will be further elaborated on separate tabs.
Surface Cleanliness
Surface cleanliness concerns particles present on the surface of a machine component. Typically, no visible particles are allowed, and the strictest requirements now qualify particles down to a size of 0.5 µm.
Thanks in part to our modern water treatment installation, we easily meet the requirement of having no visible particles. A 0.2 µm filter, in combination with various other filters and treatments, ensures that the rinse baths are free of contamination and that your product emerges clean from our ultrasonic cleaning line, meeting the specified requirements.
During the manufacturing process, particle contamination cannot be completely avoided. The cleaning process must therefore be capable of removing any particles that may still be present. Intermediate cleaning during or after the manufacturing process is necessary to prevent emulsions from drying. This is also very important for the next aspect: Vacuum Cleanliness.
Molecular Cleanliness
For vacuum environments, very strict requirements apply to metal contamination on the surface of machine components. This group of metals—primarily zinc, but also lead, tin, and indium—has a low melting point and can cause unwanted deposits inside the machine, potentially leading to major functional issues.
These metals are prohibited during the manufacturing process. The cleaning process must therefore be capable of removing any atomic contamination that may still be present.
Gas Purity
There are often strict requirements regarding hydrocarbon contamination in internal channels. These channels are used for the transport of ultra-clean gases. This type of contamination, such as oil-like substances, can cause unwanted deposits or chemical reactions within the environment.
During the manufacturing process, oil-based fluids such as coolant and cutting oil cannot be avoided. The cleaning process must therefore be capable of removing any atomic contamination that may still be present. Intermediate cleaning during or after the manufacturing process is necessary to prevent emulsions from drying.